Pulse tube cryogenic cooler

摘要

A pulse tube cryogenic cooler, includes: a pressure vibration generating device configured to generate pressure vibration in operation gas; a regenerator connected to the pressure vibration generating device; a pulse tube connected to the regenerator; a phase control mechanism connected to the pulse tube; and a heat exchanger provided at an end of the pulse tube; wherein the heat exchanger includes a first laminating part where porous plates having piercing holes and spacers are mutually laminated; and a second laminating part where lower part mesh members are laminated.