| 发明名称 |
Substrate treatment method and substrate treatment apparatus |
| 摘要 |
A substrate treatment method including the steps of: generating droplets of a treatment liquid by mixing the treatment liquid with a gas; and causing the treatment liquid droplets generated in the liquid droplet generating step to impinge on a surface of a substrate being treated. The treatment liquid droplets have a volume median diameter of 5 mum to 40 mum.
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| 申请公布号 |
US7600522(B2) |
申请公布日期 |
2009.10.13 |
| 申请号 |
US20090397632 |
申请日期 |
2009.03.04 |
| 申请人 |
DAINIPPON SCREEN MFG. CO., LTD. |
发明人 |
SATO MASANOBU;HIRAE SADAO;YASUDA SHUICHI |
| 分类号 |
B08B3/00;H01L21/304;C23F1/00;H01L21/00;H01L21/306;H01L21/461 |
主分类号 |
B08B3/00 |
| 代理机构 |
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