发明名称 Production of Semiconductor Devices
摘要 A method of producing a layered semiconductor device comprises the steps of: (a) providing a base comprising a plurality of semiconductor nano-structures, (b) growing a semiconductor material onto the nano-structures using an epitaxial 5 growth process, and (c) growing a layer of the semiconductor device onto the semiconductor material using an epitaxial growth process.
申请公布号 KR20090107403(A) 申请公布日期 2009.10.13
申请号 KR20087032223 申请日期 2008.01.31
申请人 发明人
分类号 H01L21/20;B82B3/00 主分类号 H01L21/20
代理机构 代理人
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