| 摘要 |
PURPOSE: A chemical supply device is provided to maintain supply pressure of chemical into normal pressure by reducing an error of set pressure and inner pressure of a process canister. CONSTITUTION: A chemical supply device includes a push and purge gas supply part(30), a bulk canister(10), a process canister(20), and a pressure control part(50). The push and purge gas supply part supplies a push gas and a purge gas for providing supply pressure of chemical. The bulk canister stores the chemical. The process canister receives and stores the chemical from the bulk canister through a refill part. The pressure control part exhausts an air inside the canister or the purge gas to outside.
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