| 摘要 |
A testing apparatus is provided with a test head main body (130) which transmits and receives signals to and from a device (200) to be tested; a prober (110) whereupon the device (200) is placed; and a probe card (300) arranged between the test head main body (130) and the prober (110). The probe card (300) is provided with a plurality of probe pins (320), which are arranged on a surface facing the prober (110) and are electrically connected to a terminal of the device (200); a plurality of pads (330) on the side of the test head, which are arranged on a surface facing the test head main body (130), electrically connected to the spring pins (129) on the side of the test head main body (130), and are also electrically connected to the probe pins (320); and pads (340) on the side of the prober, which are arranged on the surface facing the prober (110) and are electrically connected to the probe pins (320). |
