| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a low-cost and high-performance piezoelectric micro electronic mechanical system (MEMS) and its production process. <P>SOLUTION: The production process of the piezoelectric element includes: a step of forming a semiconductor layer 2 on an insulator substrate 1; a step of melting the semiconductor layer 2 by laser irradiation and carrying out recrystallization to expose a (111) plane on the top surface of a semiconductor crystal layer 21; and a step of forming, on the semiconductor crystal layer 21, a piezoelectric layer 31 of hexagonal crystal structure in which a c-axis ([0001] axis) is perpendicular to the lamination planes. <P>COPYRIGHT: (C)2010,JPO&INPIT |
