发明名称 STENCIL MASK
摘要 <P>PROBLEM TO BE SOLVED: To provide a stencil mask which holds heat resistance and is hardly broken when fixed. <P>SOLUTION: A stencil mask 100 comprises a frame 8, a thin layer 2 developed with the frame 8, and a thick layer 12 formed at a part of the surface of the thin layer 2. An opening 10 is formed in the layer 2 in a range where no thick layer 12 is stacked. In the cross section of the lamination of the thin layer 2 and the thick layer 12a along an arbitrary line segment D2 extending from a center 11 to the inside 8a of the frame 8, when the stencil mask 100 is viewed from above, a center of gravity G2 in the cross section is positioned closer to the frame 8 side more than to a middle point G1 of the line segment D2. The heat resistance of the stencil mask 100 is held by the thick layer 12, and the deflection of the stencil mask 100 which is caused by impact acceleration when it is fixed is reduced. <P>COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2009231465(A) 申请公布日期 2009.10.08
申请号 JP20080073839 申请日期 2008.03.21
申请人 TOYOTA MOTOR CORP 发明人 NISHIWAKI TAKESHI
分类号 H01L21/027;G03F1/20;G03F1/22;G03F7/20;H01L21/266 主分类号 H01L21/027
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