| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of adjusting flaw detection level to reduce the member of the working processes of flaw inspection by an actual machine and to enhance the throughput of a flaw inspection device, and to provide a flaw inspection system. Ž<P>SOLUTION: In the method of adjusting flaw detection level, a high-sensitivity parameter is set with respect to a flaw detection algorithm by the flaw inspection device: after actual detection data is acquired, the resetting of the sensitivity parameter and the acquirement of a simulation detection data and/or the formation of review data are repeated on an off-line with respect to the flaw inspection device until a predetermined detection level is achieved. The flaw inspection system capable of executing this adjusting method is also disclosed. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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