| 摘要 |
A wafer-retaining unit (20) has a plurality of vertically superimposed single-wafer retaining sections (21 to 23), each having a wafer-retaining frame (21) abutting against only a lower end edge portion of the outer periphery of a semiconductor wafer (W), a wafer-securing frame (22) disposed vertically movably relative to the wafer-retaining frame (21) to abut against only an upper end edge portion of the outer periphery of the semiconductor wafer (W), and wafer lift members (23) that lift up the semiconductor wafer (W) to a position where it is upwardly separate from the wafer-retaining frame (21) and keep the semiconductor wafer (W) in this position. Consequently, a plurality of semiconductor wafers (W) can be accommodated efficiently and safely without increasing the space between each pair of mutually adjacent semiconductor wafers (W). At the same time, the semiconductor wafers (W) can be loaded and unloaded satisfactorily.
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