| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a pad dresser which, while maintaining a proper level of elasticity for dressing based on the surface of a polishing pad, can be used without the need for replacement over a long time. <P>SOLUTION: An elastic member 31 bundled by a wire bundling band 35 is mounted on the lower end of a support part 32. The elastic member 31 includes tungsten wires, which are 25 mm in the length and 0.15 mm in diameter, bundled with every 30 wires in one bundle. The tip part of each element wire of the elastic member 31 comes into contact, in a round cut state, with a polishing pad 20 to dress the polishing pad 20. The diameter of the tip part of each element wire of the elastic member 31 is small to reduce the cutting width of the polishing pad 20. The element wires of the elastic member 31 are bundled with a wire bundling band 35 to enhance the rigidity of the elastic member 31 and thus realize the application of a high pressure to the tip part having a small diameter in the element wires. Therefore, the tip part of the elastic member 31 can give an effective incision depth to the polishing pad 20. <P>COPYRIGHT: (C)2010,JPO&INPIT |
