| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an actuator structure in which the break of a mirror device is easily detected and the manufacturing process of the actuator is simple. Ž<P>SOLUTION: The actuator includes: a movable plate (31) on which a reflection mirror (32) is formed; a fixing part (35) for a supporting frame supporting the movable plate (31); a pair of torsion bars (33 and 34) which oscillatably respectively support both ends of the movable plate (31) on the supporting frame fixing part (35), wherein a mirror (32) and a line break detection wiring are integrally formed of a conductive film (38) on the surface of the movable plate (31) and the respective torsion bars (33 and 34), and both ends (36 and 36) of the conductive film serve as the connection parts of an electric circuit. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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