发明名称 METHOD OF FABRICATING OPTICAL FUNCTIONAL ELEMENT
摘要 A comb-teeth electrode, a frame electrode, and an inter-electrode wire are formed on a first major surface of a substrate made of a ferroelectric material. A back-face electrode is formed on a second major surface of the substrate. A periodically-poled structure is formed by applying a voltage between the frame electrode and the back-face electrode. A region equivalent to the periodically-poled structure is cut from the substrate thereby fabricating an optical functional element. The inter-electrode wire is formed on an insulating layer that is formed on the substrate.
申请公布号 US2009250160(A1) 申请公布日期 2009.10.08
申请号 US20090401203 申请日期 2009.03.10
申请人 MITSUBISHI ELECTRIC CORPORATION 发明人 SODA SHINNOSUKE;YOSHIDA YUKIHISA
分类号 B32B37/00 主分类号 B32B37/00
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