发明名称 |
METHOD OF FABRICATING OPTICAL FUNCTIONAL ELEMENT |
摘要 |
A comb-teeth electrode, a frame electrode, and an inter-electrode wire are formed on a first major surface of a substrate made of a ferroelectric material. A back-face electrode is formed on a second major surface of the substrate. A periodically-poled structure is formed by applying a voltage between the frame electrode and the back-face electrode. A region equivalent to the periodically-poled structure is cut from the substrate thereby fabricating an optical functional element. The inter-electrode wire is formed on an insulating layer that is formed on the substrate.
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申请公布号 |
US2009250160(A1) |
申请公布日期 |
2009.10.08 |
申请号 |
US20090401203 |
申请日期 |
2009.03.10 |
申请人 |
MITSUBISHI ELECTRIC CORPORATION |
发明人 |
SODA SHINNOSUKE;YOSHIDA YUKIHISA |
分类号 |
B32B37/00 |
主分类号 |
B32B37/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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