发明名称 WIRE ELECTRIC DISCHARGE MACHINING DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a wire electric discharge machining device capable of controlling electric discharge machining with good timing even if machining conditions temporarily worsen to thereby prevent a wire from breaking. Ž<P>SOLUTION: The wire electric discharge machining device includes the wire 11 for electric-discharge-machining a silicon block 3 by causing electric discharge on an opposite part 14 facing the silicon block 3, a pulse generation part 24 for generating a pulse voltage signal for applying pulse voltage between the silicon block 3 and the wire 11, a DC power source 23 for supplying DC power to the pulse generation part 24, a voltmeter 21 for detecting voltage between the silicon block 3 and the wire 11, and a pulse waveform setting part 22 for setting a signal waveform of the pulse voltage signal based on a voltage detection value detected by the voltmeter 21 to output a pulse waveform signal corresponding to the signal waveform to the pulse generation part 24. The pulse waveform setting part 22 sets the signal waveform so that machining energy for the electric discharge machining lowers when an absolute value of the voltage detection value is lower than a predetermined voltage value. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
申请公布号 JP2009226504(A) 申请公布日期 2009.10.08
申请号 JP20080071828 申请日期 2008.03.19
申请人 MITSUBISHI ELECTRIC CORP 发明人 NAKAGAWA TAKAYUKI;SATO TATSUSHI;MIYAKE HIDETAKA;SENDAI TOMOKO;IWATA TAKAAKI;ONODERA YASUO
分类号 B23H7/02;H01L21/304 主分类号 B23H7/02
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