| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a polyimide benzoxazole film whose adhesiveness is easily improved and also can be maintained even in a severe environment of high temperature and high humidity. Ž<P>SOLUTION: The surface structure-modified polyimide benzoxazole film is produced by ion beam treatment of a polyimide benzoxazole film, and its surface area factor became ≥1.2 and ≤2.8, and polar component (γ<SB>sh</SB>) of the surface free energy of the film became 5 mN/m or less, and the polar component (γ<SB>sh</SB>) of the surface free energy of the film can be made at least 15 mN/m by electric discharge treatment or by active energy beam treatment of the film. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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