PRODUCTION EQUIPMENT AND METHOD OF THIN-FILM LAMINATE

摘要

Disclosed is production equipment of a thin-film laminate wherein the position in the vertical direction of a flexible strip substrate is maintained with high precision even if the substrate is conveyed over a long distance in the horizontal direction while the width direction of the substrate is directed toward the vertical direction. When a thin film laminate is produced by laminating a plurality of thin films on the surface of a flexible strip substrate (1), at least a pair of grip rollers (52U) arranged between at least two film deposition chambers out of a plurality of film deposition chambers and gripping the end of the substrate on the upper side in the vertical direction is installed obliquely upward such that the rotational direction of the grip roller forms an angle ?U with respect to the conveyance direction of the substrate (1), and the height of the substrate (1) can be controlled by changing the force of the grip rollers (52U) for gripping the substrate (1) thereby generating a rising force (Fx) in the substrate (1).