<p>A power splitter and/or combiner is described. The power splitter may be provided asa broadband, passive, divide by N power splitter that may be advantageously employed in providing power to multiple electrodes within a plasma source. The power splitter comprises a transmission line and a plurality of N secondary windings arranged about the transmission lines.</p>
申请公布号
WO2009121975(A1)
申请公布日期
2009.10.08
申请号
WO2009EP54108
申请日期
2009.04.06
申请人
DUBLIN CITY UNIVERSITY;ELLINGBOE, ALBERT ROGERS;MICHNA, THOMAS