发明名称 SPECIMEN INFORMATION OBTAINING APPARATUS AND METHOD
摘要 <p><P>PROBLEM TO BE SOLVED: To implement a measurement at the high reliability and the high repeatability without applying an excess pressure to a specimen in an apparatus and a method for obtaining information on the specimen using a terahertz wave. <P>SOLUTION: The apparatus for obtaining the information on the specimen 102 using the terahertz wave comprises: a generation section; a propagation section; an adjustment means 103; a detection section 104; and control sections 105-108. The generation section generates the terahertz wave. The propagation section propagates the terahertz wave from the generation section. The adjustment means 103 adjusts a filled state of the specimen 102 in the propagation section. The detection section 104 detects the terahertz wave from the propagation section. The control sections determine the filled state of the specimen 102 adjusted by the adjustment means 103, and control the adjustment means 103 based on a signal change in the terahertz wave detected by the detection section 104 when the adjustment means 103 adjusts a filled state of the specimen 102. <P>COPYRIGHT: (C)2010,JPO&INPIT</p>
申请公布号 JP2009229323(A) 申请公布日期 2009.10.08
申请号 JP20080076865 申请日期 2008.03.24
申请人 CANON INC 发明人 KASAI SHINTARO;ONOUCHI TOSHIHIKO
分类号 G01N21/35;G01N21/3586 主分类号 G01N21/35
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