| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a semiconductor device for transmission type LCOS which is mounted with a variety of circuits, superior in display speed, and produced at low manufacturing cost. Ž<P>SOLUTION: The semiconductor device uses a single-crystal semiconductor substrate 101, and includes a recessed portion 130 on the reverse surface of the semiconductor substrate where a driving electrode 120 and an element isolation region 102 overlap with each other in a plane. With the recessed portion, the semiconductor device is constituted which has light transmissivity although using the single-crystal substrate. Further, the film thickness of the semiconductor substrate constituting an element is not limited, so circuits to be mounted are not limited either and a driving voltage for an optical modulating substrate is made high. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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