| 摘要 |
<P>PROBLEM TO BE SOLVED: To obtain particle diameter and hardness of dry ice suitable for cleaning in consideration of the surface area ratio of a nozzle and a horn in the case of projecting liquefied carbonic acid gas in form of dry ice to an object to be cleaned. Ž<P>SOLUTION: In the cleaning apparatus consisting of a jetting head composed of a nozzle for jetting pressurized liquefied carbonic acid gas and a horn surrounding the discharge port of the nozzle and arranged in front of the nozzle to produce dry ice from the jetted liquefied carbonic acid gas from the nozzle and projecting the dry ice to the object to be cleaned, the inner diameter to the inner diameter of the horn is so set as to adjust (cross-sectional surface area of the horn) / (cross-sectional surface area of the nozzle) in a range of 25 to 35. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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