| 摘要 |
PROBLEM TO BE SOLVED: To improve the current density of a field effect transistor whose channel is a carbon nanotube, and to reduce a gate off current. SOLUTION: A catalyst film or a catalyst fine particle is formed on a substrate under the channel, the carbon nanotube is grown from a substrate surface under the channel using the catalyst film or the catalyst particle, the carbon nanotube is chained, a source and a drain are bridged, and a semiconductor conductive carbon nanotube is made to be present in each of many bridge routes practically. By the structure, the probability of configuring all the bridge routes by a metal conductive carbon nanotube is reduced. As a result, the gate-off current is reduced. Also, since the carbon nanotube is grown from the substrate and chained in a longitudinal direction, the density of the carbon nanotube is increased. As a result, an on-current is increased. COPYRIGHT: (C)2010,JPO&INPIT
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