| 摘要 |
There is provided a target transport device including a support member having a support surface capable of supporting a target that is transported toward a downstream side from an upstream side, suction openings of suction holes capable of generating a negative pressure when the suction holes are suctioned being formed on the support surface, a heater for heating the support member, and a temperature adjusting unit for adjusting a temperature of the target such that a temperature difference generated in the target due to uneven distribution of the suction openings that relatively become a low temperature in the support member when heat from the heater is applied to the target via the support surface of the support member is restrained.
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