| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a microelectromechanical (MEMS) sensing apparatus. <P>SOLUTION: The microelectromechanical current sensing apparatus includes: a carrier part (306); an optical part (301) which is provided on the carrier part (306), including an optical paths (402, 403) and a magneto-sensitive element (401) in an optical path (402 403); a light source (302a) provided on the carrier part (306) and communicating with a first end of the light path (402) in an operational status; and an optical detector (302b) provided on the carrier part (306) and communicating with a second end of the optical path (403) in the operational status. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
