| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To obtain a MEMS oscillator capable of readily adjusting frequencies. <P>SOLUTION: A discharge electrode 36 is provided in the side opposite to a fixed electrode 24 across a beam part 30. For example, when the frequency of the MEMS oscillator 16 is to be adjusted by increasing the mass of an oscillating element 28, the oscillating element 28 serves as a positive electrode; the discharge electrode 36 serves as a negative electrode; and a DC voltage is applied thereto until arc discharge occurs. When the arc discharge occurs between the oscillating element 28 and the discharge electrode 36, an inert gas is ionized to become positive ions. The positive ions are collided with the discharge electrode 36 serving as the negative electrode and sputters the material of the discharge electrode 36 or vaporizes the material of the discharge electrode 36. Then, part of the substance discharged from the discharge electrode 36 adheres to the oscillating element 28. In this manner, the part of the discharged substance is caused to adhere to the oscillating element 28; as a result, the mass of the oscillating element 28 can be increased, and the resonant frequency of the MEMS oscillator 16 can be reduced. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
