摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for initial adjustment of a thermal flowmeter which enables the suppression of a nonuniformity in a zero point change characteristic of a thermal flow sensor, regardless of a difference in a manufacturing lot. <P>SOLUTION: The method includes an adjustment process wherein a heating temperature Th of a heating element is determined from a resistance value RH of the heating element in a heater circuit and a resistance value RR of a temperature detecting element and wherein a pressure characteristic of the thermal flow sensor is made to agree with a preset one, by adjusting an amplification gain G of a sensor circuit according to a divergence of the heating temperature from a reference temperature. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |