| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing apparatus forming an organic thin film such as a light emitting layer with high material use efficiency or high operating efficiency, thereby producing a light emitting device. Ž<P>SOLUTION: The manufacturing apparatus includes a load chamber, a common chamber coupled to the load chamber, a plurality of treatment chambers coupled to the common chamber and a laser beam source. A material layer is formed on a second substrate in advance in the treatment chamber and the second substrate and a first substrate are aligned in the common chamber. Then, the second substrate is scanned by laser beam to selectively form a film on the first substrate. In this manufacturing apparatus, selective film-formation is performed on the first substrate in the common chamber a plurality of times. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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