| 摘要 |
PROBLEM TO BE SOLVED: To provide a device for sensing gas capable of removing an influence caused by a frequency drift with a simple configuration. SOLUTION: The gas sensor device includes a substrate (10) with first piezoelectric oscillators (12<SB>1</SB>-12<SB>n)</SB>having a film for adsorbing gas molecules to a surface thereof and a second piezoelectric oscillator (12<SB>0</SB>) arranged thereon, first oscillator circuits (20<SB>1</SB>-20<SB>n)</SB>composed of the first piezoelectric oscillators, a second oscillator circuit (20<SB>0</SB>) composed of the second piezoelectric oscillator, a gate clock generation circuit (22) for generating a gate clock signal by dividing the oscillation output of the second oscillator circuit, and counter circuits (30<SB>1</SB>-30<SB>n)</SB>for counting the clock numbers of the oscillator output of the first oscillator circuits based on the gate time of the gate clock signal. COPYRIGHT: (C)2010,JPO&INPIT
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