| 摘要 |
A nonvolatile semiconductor memory device according to the present invention is a NAND-type flash memory which is electrically capable of programming/erasing. The nonvolatile semiconductor memory device has at least 3 or more memory cell columns in which a plurality of memory cells are connected in series, and these memory cell columns are adjacent to each other via a shallow trench isolation. And, a programming operation is performed individually to each of these memory cell columns. In this manner, a programming-prevent voltage is surely provided at on at least one side of both surfaces of the semiconductor substrate which are adjacent via a shallow trench isolation to the surface of the semiconductor substrate under the programming-prevented memory cell. Therefore, a miss-programming to an unselected memory cell can be largely reduced.
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