| 摘要 |
A two-dimensional transmission cross coefficient is obtained based on a function representing a light intensity distribution formed by an illumination apparatus (110) on a pupil plane of the projection optical system (140) and a pupil function of the projection optical system. Based on the two-dimensional transmission cross coefficient and data of a pattern on an object plane of the projection optical system, an approximate aerial image (40c) is calculated by using at least one of plural components of an aerial image on an image plane of the projection optical system. Data of a pattern of an original (130) is produced based on the approximate aerial image. |
