| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric actuator, a liquid discharge head, a liquid discharge device and a method of driving the piezoelectric actuator, capable of desirably driving the piezoelectric actuator having a piezoelectric film formed by epitaxial growth method such as sputtering or orientation growth method. <P>SOLUTION: A bottom electrode 118 is formed on the upper face of a substrate, and a piezoelectric film 120 is formed on the bottom electrode 118 by the sputtering, and an upper electrode 122 is formed on the upper face of the piezoelectric film 120. Further, a restraining plate 123 is formed on the upper face of the upper electrode 122. When the restraining plate 123 is not formed, and an electric field directed opposite to the polarizing direction of the piezoelectric film 120 is applied, the piezoelectric actuator 125 is deformed in an upwardly projecting shape. On the other hand, when the restraining plate 123 is formed, and the electric field directed opposite to the polarizing direction of the piezoelectric film 120 is applied, the piezoelectric actuator 125 is deformed in a downwardly projecting shape. <P>COPYRIGHT: (C)2010,JPO&INPIT |
