| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a drive method of a field emission electron source capable of providing an imaging device capable of providing image information without having a linear defect; and a field emission electron source. <P>SOLUTION: This drive method of a field emission electron source is characterized in that, in driving a matrix type field emission electron source with an electron source array arranged in each of cell areas arranged in a matrix-like form, first gate electrodes 9a and second gate electrodes 9a are arranged oppositely to emitters of an emitter array with the plurality of emitters arranged therein; and the first and second gate electrodes 9a and 9b are driven by drive circuits 15a and 15b different from each other in the same period. Even when leak occurs between the first gate electrode 9a and the emitter, normal electron emission can be expected by the potential difference between the second gate electrodes 9b, image quality can be ensured, and a linear defect can be eliminated. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
