| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for manufacturing an inkjet recording head in which clogging of a nozzle opening part by an adhesive can be prevented, and to provide an inkjet recording head, and an inkjet recorder. <P>SOLUTION: The method for manufacturing the inkjet recording head 100 which delivers an ink liquid from the nozzle opening part by pressure change in a pressure generation chamber, comprises a process of forming a groove part 51 to be a pressure generation chamber to a front surface of a substrate 1, a process of forming a groove part 52 to be the nozzle opening part to a bottom surface of the groove part 51, a process of forming to bury a sacrificial film 53 in the groove parts 51 and 52, a process of forming an oscillation film 20 on front surfaces of the sacrificial film 53 and the substrate 1, a process of forming a piezoelectric element 30 on the oscillation film 20, a process of opening a bottom surface of the groove part 52 by grinding the rear surface of the substrate 1, a process of forming an opening part to expose the sacrificial film 53 from the front surface side of the substrate 1, and a process of removing by etching the sacrificial film 53 via the opening part. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
