| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a TOF-MS having improved mass resolution by ensuring precision of an incident face of an MCP against an ion optical axis of a device, and provide a charged particle detector used for the TOF-MS. Ž<P>SOLUTION: In the charged particle detector 100 formed by pinching the MCP by an IN electrode 1 and an OUT electrode, and afterwards by installing an anode electrode and a rear cover, constituent members behind the IN electrode 1 are installed on the inner side than the IN electrode 1, as seen from the MCP incident face. By utilizing a flange part installed at the IN electrode 1 part protruding to the outer side than the constituent members on the rear side, the charged particle detector is fixed to a cabinet wall face 330 of the TOS-MS by screwing or the like. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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