发明名称 |
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE |
摘要 |
<P>PROBLEM TO BE SOLVED: To manufacture chips having a plurality of chip thicknesses without reducing a throughput and without increasing a manufacturing cost. Ž<P>SOLUTION: The method for manufacturing the chip includes the steps of: making the wafer thickness into a first-thickness by cutting the backside of the wafer with a semiconductor circuit corresponding to a plurality of chips formed on the surface (a step S3); taking out the first-thickness chip from the wafer (a step S4); making the thickness of the wafer into a second-thickness by further cutting the backside of the wafer (a step S5); and taking out the second-thickness chip from the wafer (a step S6). Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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申请公布号 |
JP2009231435(A) |
申请公布日期 |
2009.10.08 |
申请号 |
JP20080073346 |
申请日期 |
2008.03.21 |
申请人 |
FUJITSU MICROELECTRONICS LTD |
发明人 |
YOSHIMOTO KAZUHIRO;SHIMOBEPPU YUZO;TESHIROGI KAZUO;SHINJO YOSHIAKI;FUKAYA HIRONORI;SAKAMOTO MIKA;SAKAUCHI KANA;SATO KAZUO |
分类号 |
H01L21/301;H01L21/304 |
主分类号 |
H01L21/301 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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