发明名称 MEASURING DEVICE AND MEASURING METHOD
摘要 <P>PROBLEM TO BE SOLVED: To improve the measurement cycle and measurement accuracy in a multipoint measuring device. Ž<P>SOLUTION: This measuring device 100 comprises first and second pipelines extended from first and second measurement places, first, second and third measuring instruments for measuring components in gas at the first and second measurement places, a first switching means for sequentially introducing the components in gas at the first and second measurement places into the first measuring instrument through the first and second pipelines, first and second relay lines that are positioned between the first switching means and the first and second measurement places and are connected to the first and second pipelines, respectively, a second switching means that is connected to the first relay line and introduces the component in gas at the first measurement place into the second measuring instrument through the first relay line, and a third switching means that is connected to the second relay line and introduces the component in gas at the second measurement place into the third measuring instrument through the second relay line. Thus, the measurement cycle and measurement accuracy are improved in the multipoint measuring device. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
申请公布号 JP2009229334(A) 申请公布日期 2009.10.08
申请号 JP20080076983 申请日期 2008.03.25
申请人 FUJITSU MICROELECTRONICS LTD 发明人 SATO YOSHI;IWATSUBO RYUJI
分类号 G01N1/00;G01N1/26 主分类号 G01N1/00
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