LIQUID RAW MATERIAL VAPORIZER AND FILM FORMING APPARATUS USING THE SAME

摘要

A liquid raw material vaporizer has a vaporizing section provided with an introduction port from which a liquid raw material in a state of droplet is introduced from a liquid raw material supply section; a bottomed cylindrical housing main body having an opening end on the introduction port side; a columnar block having a flange section which closes the opening end of the housing main body and is fitted in the housing main body by having a space between the inner surface of the housing main body and the columnar block; a breathable mist trap member, which is adhered on the inner surface to cover the outer surface of the columnar block, in a vaporizing flow path formed between the inner surface and the outer surface; a heating section arranged to cover the housing main body; and a jetting port, which is formed to be connected with the introduction port and penetrates the columnar block from an end surface to a side surface on the introduction port side of the columnar block and jets the liquid raw material toward the inner surface of the mist trap member; and a discharge port which is arranged on a bottom section of the housing main body and discharges a raw material gas generated by vaporization.