DIFFRACTION IMAGE CAPTURING METHOD AND CHARGED PARTICLE BEAM DEVICE
摘要
<p>A charged particle beam microscope produces a diffraction image by parallel irradiating a sample (22) having a known structure with a charged particle beam and corrects the variation of the distance (L) dependent on the angle (?) of diffraction between the sample and a detector by measuring the distance (r) reflecting the structure of the sample between the spots shown in the diffraction image. With this, the distortion varying with the off-axis distance from the optical axis shown in the diffraction image is corrected, and a high-accuracy structure analysis is achieved by accurately analyzing the positions of the spots shown in the diffraction image.</p>
