| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To solve the problem that a photo-sensor used in an X-ray imaging and display device or the like is formed on a base electrode, however, an amorphous silicon film constituting the photo-sensor is likely peeled off depending on the surface state of the base electrode, particularly, effects of contamination or the like by dry etching when opening contact holes in an insulating film are serious. <P>SOLUTION: A drain electrode 7 is composed of a lower layer 7a and an upper layer 7b. The upper layer 7b is removed after opening a contact hole CH1. Namely, a photodiode 100 is formed on the lower layer 7a. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
