| 摘要 |
PROBLEM TO BE SOLVED: To provide a mounting and height-adjusting mechanism of a substrate floating mechanism that reduces the assembling man hour of the substrate floating mechanism and reduces the price of the whole device including precise processing. SOLUTION: A substrate conveying device includes: a substrate floating mechanism 3 for floating and keeping the substrate 2 at a certain height by blowout and suction of air; a height position adjusting mechanism 4 for individually adjusting the height of the substrate floating mechanism 3; a substrate gripping mechanism 5 for fixing one end of the substrate 5 protruded from one side surface of the substrate floating mechanism 4; a substrate conveying mechanism 6 that is disposed adjacently to one side surface of the substrate floating mechanism 3 and conveys the substrate 2 in the direction along the conveying direction X via the substrate gripping mechanism 5; a floating control section A for supplying air to the substrate gripping mechanism 5 and sucking air from the substrate floating mechanism 3; and an inspection section B for inspecting the surface of the substrate 2. COPYRIGHT: (C)2010,JPO&INPIT
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