| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a gas supply system capable of eliminating mixing-in of an impurity caused by installation-removal operation of a pipe part, and capable of safely maintaining-managing a filling vessel of high purity gas by quick operation with a simple constitution. Ž<P>SOLUTION: This gas supply system includes: a joining part So with a vessel valve 1a as a part of the pipe part L, having a connecting part S between a purge gas flow passage Ls and the pipe part L; a first bypass flow passage B1 arranged in the middle between the joining part So and the vessel valve 1a; and a second bypass flow passage B2 arranged in the middle between the connecting part S and a process device 2. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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