| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a shower plate which enhances the degree of freedom in design, and to provide a production process of shower plate. Ž<P>SOLUTION: The shower plate 200 includes a first flat board 201, a second flat board 202, and a third flat board 203 each having grids which intersect at a predetermined angle. A groove functioning as a channel 201a is formed in the first flat board 201 having grids which intersect at a predetermined angle, the second flat board 202 having grids which intersect at a predetermined angle is superimposed on the first flat board 201, and then the first flat board 201 and the second flat board 202 are joined by thermal diffusion bonding. A groove functioning as a channel 203a is formed similarly in the third flat board 203 and then the third flat board is joined to the second flat board 202 by thermal diffusion bonding. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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