| 摘要 |
<P>PROBLEM TO BE SOLVED: To solve a problem that in an EL panel assembly system, a plurality of treating chambers and a plurality of substrate transfer parts are combined and, as a result, vibration generated in one treating chamber is transmitted to the other treating chamber and treatment accuracy in the other chamber is deteriorated. Ž<P>SOLUTION: The EL panel assembly system is constructed of a plurality of treating chambers which house treating parts of a coating device for coating an adhesive on a substrate for assembling a panel, a dropping device for dropping a filling agent, and a pasting device for pasting the substrate, and a plurality of substrate transfer parts which house transfer robots for carrying the substrate in or out of the treating chamber. A gate valve and a rubber sheet are used to connect the connection part between each treating chamber and each substrate transfer part and thereby, vibration generated at treating operation of the devices in the treating chamber is not transmitted to the other treating chamber. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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