发明名称 |
METHODS AND APPARATUS FOR AN INTEGRAL LOCAL SUBSTRATE CENTER FINDER FOR I/O AND CHAMBER SLIT VALVES |
摘要 |
Systems and apparatus are provided for locating the center of a substrate. The invention includes a frame, mounted between a slit valve assembly and a transfer chamber wall in substrate processing equipment; at least one emitter, housed in the frame, and adapted to emit a signal; at least one sensor, housed in the frame, and adapted to receive the emitted signal; and a controller adapted to determine a center of a substrate based on the signal received by the sensor. Numerous other aspects are provided. |
申请公布号 |
WO2009094608(A3) |
申请公布日期 |
2009.10.08 |
申请号 |
WO2009US31933 |
申请日期 |
2009.01.24 |
申请人 |
APPLIED MATERIALS, INC.;SCHAUER, RONALD, V. |
发明人 |
SCHAUER, RONALD, V. |
分类号 |
H01L21/68;B65G49/06;B65G49/07;G02F1/13;H01L21/677 |
主分类号 |
H01L21/68 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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