CONVEYING EQUIPMENT OF PLANAR BODY AND INSPECTION EQUIPMENT OF PLANAR BODY EMPLOYING IT

摘要

The equipment for conveying a planar body (1) in a predetermined conveyance direction comprises a float stage (2) constituting a traveling route extending in the conveyance direction and having an upper surface (2a) inclining in the width direction of the traveling route and a plurality of first openings (4) for jetting fluid, a side guide (5) arranged in parallel with the float stage (2) on the inclining side of the upper surface (2a) of the float stage (2) and having a plurality of second openings (6) for jetting fluid toward the traveling route wherein the force received by the planar body (1) from the fluid jetted from the plurality of first and second openings (4, 6) matches the weight of the planar body (1).