| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an illuminating device for effectively utilizing the exposure light of an interrupted optical path among exposure light emitted through a plurality of optical paths. <P>SOLUTION: The illuminating device includes: a light source optical system 3 for converging illumination light emitted from a light source part 2 to a prescribed plane and turning back return light made incident from the prescribed plane through the light source part 2 to the prescribed plane roughly in optical axis symmetry; a light division means 10 for receiving the illumination light from an incidence port 12 disposed near the prescribed plane or near the conjugate plane of the prescribed plane and emitting it from a plurality of emission ports 14a and 14b; and reflection mechanisms 20a and 20b for inserting a reflection member to a part of the optical paths of each illumination light corresponding to the plurality of emission ports 14a and 14b and making the illumination light reflected by the reflection member reversely advance to the prescribed plane as the return light. <P>COPYRIGHT: (C)2010,JPO&INPIT |
