发明名称 X-RAY DETECTOR
摘要 <p><P>PROBLEM TO BE SOLVED: To improve a spatial resolution in a direct conversion type X-ray detector. <P>SOLUTION: The X-ray detector comprises a semiconductor substrate, a plurality of pixel electrodes arranged in a matrix shape on the X-ray irradiation surface side of the semiconductor substrate, and a flat plate-like electrode provided on the plane facing the X-ray irradiation surface of the semiconductor substrate. <P>COPYRIGHT: (C)2010,JPO&INPIT</p>
申请公布号 JP2009231715(A) 申请公布日期 2009.10.08
申请号 JP20080077856 申请日期 2008.03.25
申请人 TOSHIBA CORP 发明人 ATSUTA MASAKI;HARA YUJIRO;NAKAO HIDEYUKI
分类号 H01L31/09;G01T1/24;G01T7/00;H01L27/14 主分类号 H01L31/09
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