摘要 |
<p><P>PROBLEM TO BE SOLVED: To improve a spatial resolution in a direct conversion type X-ray detector. <P>SOLUTION: The X-ray detector comprises a semiconductor substrate, a plurality of pixel electrodes arranged in a matrix shape on the X-ray irradiation surface side of the semiconductor substrate, and a flat plate-like electrode provided on the plane facing the X-ray irradiation surface of the semiconductor substrate. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |