METHOD FOR PRODUCING BARIUM TITANATE PRECURSOR SOLUTION, METHOD FOR PRODUCING BARIUM TITANATE THIN FILM, BARIUM TITANATE THIN FILM OBTAINED BY THE PRODUCTION METHOD, AND ELECTRONIC COMPONENT USING BARIUM TITANATE THIN FILM

摘要

PROBLEM TO BE SOLVED: To provide a method for producing a barium titanate precursor solution and a method for producing a barium titanate thin film, by which a content of impurity elements, particularly aluminum element is reduced, and to provide a barium titanate thin film obtained by the production method and electronic components using the barium titanate thin film.

SOLUTION: The method for producing a barium titanate precursor solution and the method for producing a barium titanate thin film each includes: (A) a step of preparing a mixed solution of a barium alkoxide and a titanium alkoxide; (B) a step of adding an amino alcohol to the solution obtained in the step (A); (C) a step of filtering a solution obtained in the step (B) to remove insoluble matter; and (D) a step of adding a carboxylic acid to a solution obtained in the step (C), wherein the proportion of aluminum element contained as an impurity to barium element in the produced solution is <0.005 mol%. The barium titanate thin film obtained by the production method and the electronic component using barium titanate thin film are also provided.

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