SURFACE ACOUSTIC WAVE DEVICE, AND MANUFACTURING METHOD THEREOF

摘要

PROBLEM TO BE SOLVED: To provide a surface acoustic wave device capable of enhancing reliability by improving the moisture resistance of wiring, and to provide a manufacturing method thereof.

SOLUTION: The surface acoustic wave device includes: a piezoelectric substrate 2; an IDT 6 provided on the piezoelectric substrate 2; a wiring electrode 12 provided on the piezoelectric substrate 2, connected to the IDT 6 and composed of the same metal as the IDT 6; an inorganic insulating layer 20 provided on the piezoelectric substrate 2 so as to expose the wiring electrode 12 at least; an insulating resin layer 22 provided so as to cover the side face 12a of the wiring electrode 12 on the boundary of the wiring electrode 12 exposed from the inorganic insulating layer 20 and the inorganic insulating layer 20; and metal layers 14 and 18 provided on the wiring electrode 12 and the insulating resin layer 22.

COPYRIGHT: (C)2010,JPO&INPIT