| 摘要 |
<P>PROBLEM TO BE SOLVED: To reduce lapped deviation errors such as patterns. <P>SOLUTION: A control section 2a computes a compensation factor of a correction formula which carries out an alignment degradation to the n-th order of more than the 5-th order as the compensation factor of a distortion shape in a shot and/or the compensation factor between distortion shape shots in the shot, and corrects a distortion error every shot (S6, S7). Thereafter, exposure equipment inputs requested parameters and carries out an exposure (S8). <P>COPYRIGHT: (C)2010,JPO&INPIT |
