| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a reflective electrode and a method for manufacturing the electrode having excellent adhesiveness and hot corrosion resistance, stable electric characteristics and good light reflection characteristics, and to provide an electro-optic device having the reflective electrode. <P>SOLUTION: The reflective electrode is configured to have an Ag alloy film essentially comprising silver (Ag) and containing one or more elements as an additive component selected from magnesium (Mg), titanium (Ti), chromium (Cr), copper (Cu), molybdenum (Mo), palladium (Pd), platinum (Pt) and gold (Au), as well as nitrogen at a rate of content of 1.3 at% or more and 5.5 at% or less. By providing the Ag alloy film, adhesiveness with a substrate and hot corrosion resistance can be improved without greatly decreasing a specific resistance and a reflectance, and thereby, the obtained reflective electrode has excellent adhesiveness and hot corrosion resistance as well as stable electric characteristics and good light-reflection characteristics. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
