| 摘要 |
PROBLEM TO BE SOLVED: To provide a transparent conductive film which has a transparent conductive oxide layer on a transparent substrate and can improve light transmittance without reducing conductivity. SOLUTION: On a transparent conductive oxide layer 1 made of at least one layer, there is formed a carbon layer 2 on one surface or both surfaces of the transparent conductive oxide, and the carbon layer is deposited by a high frequency plasma CVD method in which at least one or more gases selected from methane, carbon dioxide and hydrogen is used, and a volume of each of the gases satisfies either one of the following formulas: Formula (1) 0.7≤methane/(methane+hydrogen)≤1.0, Formula (2) 0.6≤methane/(methane+carbon dioxide)≤1.0, and Formula (3) 0.04≤carbon dioxide/(hydrogen+carbon dioxide)≤0.10. COPYRIGHT: (C)2010,JPO&INPIT
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